HENAN ZG INDUSTRIAL PRODUCTS CO.,LTD
HENAN ZG INDUSTRIAL PRODUCTS CO.,LTD
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High precision silicon carbide components for
semiconductor processes and optical machinery equipment
Silicon carbide robotic arm is formed by isostatic pressing process and sintering at high temperature. According to the requirements of the user's design drawings, the size, thickness and shape can be finished to meet the specific requirements of the user.
Silicon carbide vacuum chuck is formed by isostatic pressing process and sintering at high temperature. According to the requirements of the user's design drawings, the size, thickness and shape can be finished to meet the specific requirements of the user.
Typical applications
In semiconductor manufacturing, extremely thin wafers are placed on silicon carbide vacuum suckers, connected to a vacuum generator, and the wafers are fixed by vacuum suction.
Used in lithography, etching, laser processing, wafer testing and other processes.
Features and advantages
Accurate size and thermal stability
Good thermal conductivity, low coefficient of expansion and temperature uniformity
Extremely high wear resistance and surface finish, fine pore size and uniform distribution, can be uniformly adsorbed to all areas of the wafer
Excellent acid and alkali corrosion resistance
Plasma impact resistance
Specifications
Can be customized according to customer drawings processing.